B1500A Agilent Semiconductor Ntaus Parameter Analyzer / Semiconductor Characterization System Mainframe

Txheej txheem cej luam thiab nta

Lub Keysight B1500A (Agilent) Semiconductor Device Analyzer yog ib qho cuab yeej modular nrog kaum qhov kev teeb tsa uas txhawb nqa ob qho tib si IV thiab CV ntsuas thiab tseem ceev ceev high-voltage pulsing. Nws paub, Microsoft ® Windows ® cov neeg siv interface txhawb nqa Agilent's EasyEXPERT software, uas muab ib qho tshiab, ntau qhov kev xav paub txog kev ua haujlwm rau cov cuab yeej ua cim. Vim tias nws qhov tsis tshua muaj tam sim no, tsis tshua muaj hluav taws xob, thiab kev ntsuas kev sib xyaw ua ke, Keysight B1500A (Agilent) tuaj yeem siv rau ntau yam ntawm cov khoom siv hluav taws xob semiconductor xav tau (IC-CAP txhawb B1500A). Nws kuj yog ib qho kev daws teeb meem zoo tshaj plaws rau cov cim xeeb tsis hloov pauv ntawm tes thiab cov cuab yeej siv ceev ceev (nrog rau kev ntsuas siab NBTI).

 

Nta thiab cov txiaj ntsig ntawm Keysight B1500A (Agilent) suav nrog:

● Superior IV ntsuas kev ua tau zoo: {{0}}.1 fA / 0.5 µV ntsuas kev daws teeb meem

● Kev ntsuas nta muaj xws li ib leeg thiab ntau-channel cheb, sijhawm ua piv txwv, sau npe cheb, quasi-static CV (siv cov SMUs), kev tswj ncaj qha thiab arbitrary linear waveform tiam (ALWG) GUI rau HV-SPGUs.

● Kev xaiv, kev sib xyaw ua ke muaj peev xwm txhawb nqa CV ntsuas txog 5 MHz

● Kev xaiv xaiv qhov chaw raws li CV-IV hloov cov kev daws teeb meem muaj nrog 0.5 µV voltage ntsuas kev daws teeb meem thiab 10 fA, 1 fA lossis 0.1 fA tam sim no ntsuas qhov muaj peev xwm

● Ib qho yooj yim xeem automation nrog built-in semiautomatic wafer prober tsav tsheb thiab xeem sequencing yam tsis muaj programming ntawm lub Quick Test hom

● Kev xaiv tau high-voltage semiconductor mem tes generator unit (HV-SPGU) muaj nrog 10 ns programmable mem tes widths thiab ntxiv /- 40 V (80 V ncov-to-peak) tso zis.

● Kev xaiv waveform generator / ceev ntsuas chav tsev (WGFMU) muaj nrog ALWG thiab ceev tam sim no lossis ntsuas qhov muaj peev xwm.

● 10 ns pulsed IV tov yog muaj rau characterizing high-k rooj vag dielectric thiab SOI (silicon-on-insulator) transistors.

● Ib hom Kev Xeem Classic muaj los muab qhov zoo, xav, thiab cov lus hais ntawm 4155/4156 interface thaum txhim kho cov neeg siv kev sib cuam tshuam los ntawm kev ua kom zoo dua ntawm Microsoft ® Windows ® GUI nta

Cov ntsiab lus tseem ceeb ntawm Keysight B1500A (Agilent) Semiconductor Device Analyzer suav nrog:

● Cov yam ntxwv dav dav

o PC-raws li ntsuas nrog Windows ® XP Professional OS

o Ib qho kev daws teeb meem rau tam sim no-voltage (IV), capacitance-voltage (CV), mem tes tiam, ceev IV, thiab ntsuas lub sij hawm.

o Kaum qhov modules rau qhov chaw saib xyuas (SMUs) thiab lwm hom module (MFCMU, HV-SPGU thiab WGFMU) *

o Kev txheeb xyuas cov ntaub ntawv offline thiab kev tsim kho daim ntawv thov ntawm Desktop EasyEXPERT software

● Kev Ntsuas Muaj peev xwm

o Txhawb kev ntsuas tam sim no-voltage (IV) rau 0.1fA thiab 0.5µV

o Txhawb ob qho tib si quasi-static thiab nruab nrab-frequency capacitance-voltage (CV) ntsuas]

o Txhawb qhov tseeb ceev IV thiab lub sijhawm ntsuas ntsuas rau ntau yam kev siv xws li kev ntsuas pulsed IV, NBTI thiab RTS.

o Txhawb nqa high voltage mem tes tiam (mus txog ± 40 V) rau siab zog thiab nco ntaus ntawv xeem.

 

Module Selection Guide:

Module Main	Cov qhov	Specification
B1510A HPSMU	2	Txog li 200V, 1A zog. 10fA tam sim no daws teeb meem
B1511A MPSMU	1	Txog 100V, 100mA quab yuam, 10fA tam sim no daws teeb meem
B1517A HRSMU	1	Txog 100V, 100mA quab yuam, 1fA tam sim no daws teeb meem
E5288A UA	NA	Txog li 100V, 100mA quab yuam, 100aA tam sim no daws teeb meem
B1520A MFCMU	1	1kHz txog 5MHz, mus txog 100V DC bias nrog SMU
B1525A HV-SPGU	1	Min 12.5ns mem tes dav, 10ns hloov lub sij hawm, mus txog 40V nrog 3 qib pu
B1530A WGFMU	1	Min 100ns mem tes dav, 10V ncov-rau-nruab tso zis, 5ns tam sim no lossis ntsuas qhov ntsuas qhov ntsuas qhov nrawm

 

 

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